Journal de Physique IV

Structural and morphological changes in low temperature annealed LPCVD Si layers

B. Cobianu, M. Modreanu, M. Danila, R. Gavrila, M . Bercu and M. Gartner

J. Phys. IV France, 11 PR3 (2001) Pr3-315-Pr3-323

DOI: 10.1051/jp4:2001340

B. Cobianu

M. Modreanu

M. Danila

R. Gavrila

M . Bercu

M. Gartner

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)