Journal de Physique IV

GaN heteroepitaxy by remote plasma MOCVD : Real time monitoring by laser reflectance interferometry

M. Losurdo, A. Grimaldi, M. Giangregorio, P. Capezzuto and G. Bruno

J. Phys. IV France, 11 PR3 (2001) Pr3-1175-Pr3-1182

DOI: 10.1051/jp4:20013148

M. Losurdo

A. Grimaldi

M. Giangregorio

P. Capezzuto

G. Bruno

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