Journal de Physique IV

In situ mass spectrometry during thermal CVD of the tris-acetylacetonates of 3-d transition metals

P.P. Semyannikov, I.K. Igumenov, S.V. Trubin and I.P. Asanov

J. Phys. IV France, 11 PR3 (2001) Pr3-995-Pr3-1003

DOI: 10.1051/jp4:20013125

P.P. Semyannikov

I.K. Igumenov

S.V. Trubin

I.P. Asanov

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