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Structure and composition investigation of RPECVD SiCN and LPCVD BCN films

M.L. Kosinova, N.I Fainer, Yu.M. Rumyantsev, M. Terauchi, K. Shibata, F. Satoh, M. Tanaka and F.A. Kuznetsov

J. Phys. IV France, 11 PR3 (2001) Pr3-987-Pr3-994

DOI: 10.1051/jp4:20013124

M.L. Kosinova

N.I Fainer

Yu.M. Rumyantsev

M. Terauchi

K. Shibata

F. Satoh

M. Tanaka

F.A. Kuznetsov

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Copyright / Publiée par : EDP Sciences