Journal de Physique IV

Development of SiNx LPCVD processes for microtechnological applications

B. Rousset, L. Furgal, P. Fadel, A. Fulop, D. Pujos and P. Temple-Boyer

J. Phys. IV France, 11 PR3 (2001) Pr3-937-Pr3-944

DOI: 10.1051/jp4:20013117

B. Rousset

L. Furgal

P. Fadel

A. Fulop

D. Pujos

P. Temple-Boyer

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