Journal de Physique IV

Low frequency PACVD of silicon-carbon alloys : Process study

L. Thomas, J.M. Badie, E. Tomasella, M. Ducarroir and R. Berjoan

J. Phys. IV France, 11 PR3 (2001) Pr3-817-Pr3-824

DOI: 10.1051/jp4:20013103

L. Thomas

J.M. Badie

E. Tomasella

M. Ducarroir

R. Berjoan

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