Journal de Physique IV

Laser etching processes : Towards sub-picosecond X-UV irradiation

D. Riedel, L. Hernandez Pozos, S. Baggott, K.W. Kolasinski and R.E. Palmer

J. Phys. IV France, 11 PR2 (2001) Pr2-499-Pr2-502

DOI: 10.1051/jp4:2001296

D. Riedel

L. Hernandez Pozos

S. Baggott

K.W. Kolasinski

R.E. Palmer

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