Journal de Physique IV

Liquid-jet laser-plasma X-ray sources for microscopy and lithography

H.M. Hertz, M. Berglund, B.A.M. Hansson, O. Hemberg and G.J. Johansson

J. Phys. IV France, 11 PR2 (2001) Pr2-389-Pr2-396

DOI: 10.1051/jp4:2001275

H.M. Hertz

M. Berglund

B.A.M. Hansson

O. Hemberg

G.J. Johansson

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