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XPS investigation of UV-annealed ultrathin Ta₂O₂ films on silicon

Q. Fang, J.Y. Zhang, Z.M. Wang, J.X. Wu, B.J. O'Sullivan, P.K. Hurley, T.L. Leedham, M.A. Audier, J.P. Sénateur and I.W. Boyd

J. Phys. IV France, 11 PR11 (2001) Pr11-301-Pr11-305

DOI: 10.1051/jp4:20011149

Q. Fang

J.Y. Zhang

Z.M. Wang

J.X. Wu

B.J. O'Sullivan

P.K. Hurley

T.L. Leedham

M.A. Audier

J.P. Sénateur

I.W. Boyd

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Copyright / Publiée par : EDP Sciences