Journal de Physique IV

Synthesis of polycrystalline silicon films on metalized ceramic substrates with laser-assisted chemical vapor deposition

G. Korevaar, A. Goossens and J. Schoonman

J. Phys. IV France, 09 PR8 (1999) Pr8-757-Pr8-762

DOI: 10.1051/jp4:1999895

G. Korevaar

A. Goossens

J. Schoonman

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