Journal de Physique IV

Investigations on TiN, TiC and Ti(CN) obtained by chemical vapor deposition

N. Popovska, C. Drothler, V.K. Wunder, H. Gerhard and G. Emig

J. Phys. IV France, 09 PR8 (1999) Pr8-437-Pr8-444

DOI: 10.1051/jp4:1999855

N. Popovska

C. Drothler

V.K. Wunder

H. Gerhard

G. Emig

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