Journal de Physique IV

2D and 1D modeling of AMT barrel reactors for silicon deposition

M. Masi, C. Cavallotti, S. Carrà, D. Crippa and G. Vaccari

J. Phys. IV France, 09 PR8 (1999) Pr8-273-Pr8-280

DOI: 10.1051/jp4:1999834

M. Masi

C. Cavallotti

S. Carrà

D. Crippa

G. Vaccari

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