Routes of metal oxide formation from metal β-diketonates used as CVD precursors A.E. Turgambaeva, V.V. Krisyuk, A.F. Bykov et I.K. Igumenov J. Phys. IV France, 09 PR8 (1999) Pr8-65-Pr8-72 DOI: 10.1051/jp4:1999808