Journal de Physique IV

Ferroelectric PZT/Si structure for integrated sensor applications

P. Verardi, M. Dinescu, F. Craciun and M. Carpentieri

J. Phys. IV France, 08 PR9 (1998) Pr9-187-Pr9-190

DOI: 10.1051/jp4:1998934

P. Verardi

M. Dinescu

F. Craciun

M. Carpentieri

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