Journal de Physique IV

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Précautions à prendre lors de la caractérisation par XRD de dépôts de nitrure de carbone sur Si(100)

S. Collard and W. Hoyer

J. Phys. IV France, 08 PR5 (1998) Pr5-241-Pr5-247

DOI: 10.1051/jp4:1998530

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