Journal de Physique IV

A study of AlN-Si₃N₄ codeposits using the L.P.C.V.D. technique

F. HENRY, B. ARMAS, M. BALAT, R. BERJOAN and C. COMBESCURE

J. Phys. IV France, 03 C3 (1993) C3-519-C3-526

DOI: 10.1051/jp4:1993372

F. HENRY

B. ARMAS

M. BALAT

R. BERJOAN

C. COMBESCURE

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