Journal de Physique IV

Properties of µPCVD poly-silicon films after rapid thermal annealing

G. BESHKOV, D.B. DIMITROV, K. GESHEVA and V. BAKARDJIEVA

J. Phys. IV France, 03 C3 (1993) C3-493-C3-497

DOI: 10.1051/jp4:1993368

G. BESHKOV

D.B. DIMITROV

K. GESHEVA

V. BAKARDJIEVA

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