Journal de Physique IV

Monte Carlo simulation on the step coverage formation processes in chemical vapor deposition

Y. SHIMOGAKI, T. UCHIDA, S. SHIGA, Y. EGASHIRA and H. KOMIYAMA

J. Phys. IV France, 03 C3 (1993) C3-203

DOI: 10.1051/jp4:1993326

Y. SHIMOGAKI

T. UCHIDA

S. SHIGA

Y. EGASHIRA

H. KOMIYAMA

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