Journal de Physique IV

A STUDY ON THE THERMODYNAMICS AND KINETICS OF TUNGSTEN DEPOSITION BY WF₆ AND GeH₄

C.A. VAN DER JEUGD, G.J. LEUSINK, G.C.A.M. JANSSEN and S. RADELAAR

J. Phys. IV France, 02 C2 (1991) C2-849-C2-856

DOI: 10.1051/jp4:19912101

C.A. VAN DER JEUGD

G.J. LEUSINK

G.C.A.M. JANSSEN

S. RADELAAR

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