Low pressure chemical vapour deposition of CNx layers by interaction between tetramethylguanidine and cyanurchloride L. Zambov, B. Ivanov, G. Georgiev, C. Popov, V. Vassilev et G. BeshkovJ. Phys. IV France, 09 PR8 (1999) Pr8-501-Pr8-508DOI: https://doi.org/10.1051/jp4:1999863
