Investigations on TiN, TiC and Ti(CN) obtained by chemical vapor deposition N. Popovska, C. Drothler, V. K. Wunder, H. Gerhard et G. EmigJ. Phys. IV France, 09 PR8 (1999) Pr8-437-Pr8-444DOI: https://doi.org/10.1051/jp4:1999855
