Structure of mixed-phase LPCVD silicon films as a function of operating conditions B. de Mauduit, C. Bourgerette, V. Paillard, P. Puech et B. CaussatJ. Phys. IV France, 09 PR8 (1999) Pr8-1091-Pr8-1098DOI: https://doi.org/10.1051/jp4:19998136
