Deposition of titanium-based films by laser-assisted thermal CVD of titanium tetrachloride R. ALEXANDRESCU, R. CIREASA, B. DRAGNEA, I. MORJAN, I. VOICU et A. ANDREIJ. Phys. IV France, 03 C3 (1993) C3-265-C3-272DOI: https://doi.org/10.1051/jp4:1993336
