CHARACTERIZATION OF POLYCRYSTALLINE SILICON PARTICLES PRODUCED VIA CVD FROM MONOSILANE IN A FLUIDIZED BED REACTOR M. MATSUKATA, T. ODAGIRI et T. KOJIMAJ. Phys. IV France, 02 C2 (1991) C2-483-C2-490DOI: https://doi.org/10.1051/jp4:1991259
