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Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process

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Characterization of Interfaces between HfO2Thin Film and Metal Electrode with Pre–Post Treatments

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Japanese Journal of Applied Physics 51 (4R) 045701 (2012)
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Characterization of Interfaces between HfO$_{2}$ Thin Film and Metal Electrode with Pre–Post Treatments

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Japanese Journal of Applied Physics 51 045701 (2012)
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Thin Solid Films 496 (2) 346 (2006)
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Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor

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Journal of Applied Physics 97 (9) 093505 (2005)
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Dual-source chemical vapour deposition of strontium and zirconium β-diketonates for strontium zirconate perovskite films

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Properties of ZnO/Al[sub 2]O[sub 3] Alloy Films Grown Using Atomic Layer Deposition Techniques

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