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Single-Source CVD of 3C-SiC Films in a LPCVD Reactor

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https://doi.org/10.1149/1.1646142

Classical and Dynamic Analysis of Gas Phase Reactivity

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https://doi.org/10.1088/0953-8984/16/17/009

Simulation of SiC deposition from SiH4/C3H8/Ar/H2 mixtures in a cold-wall CVD reactor

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Surface and Coatings Technology 177-178 382 (2004)
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MRS Proceedings 742 (2002)
https://doi.org/10.1557/PROC-742-K1.4

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MRS Proceedings 640 H5.6 (2000)
https://doi.org/10.1557/PROC-640-H5.6