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LPCVD boron carbonitride films from triethylamine borane

M.L. Kosinova, N.I. Fainer, Yu.M. Rumyantsev, A.N. Golubenko, F.A. Kuznetsov

J. Phys. IV France, 09 PR8 (1999) Pr8-915-Pr8-921

DOI: https://doi.org/10.1051/jp4:19998115

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Citations de cet article :

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Mechanical properties of thin films in the ternary triangle B–C–N

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Surface and Coatings Technology 163-164 220 (2003)
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