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Cited article:

Large microwave plasma reactor based on surface waves

C. Boisse-Laporte, N. Bénissad, S. Béchu

J. Phys. IV France, 08 PR7 (1998) Pr7-187-Pr7-194

DOI: https://doi.org/10.1051/jp4:1998715

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Modified distributed electron cyclotron resonance ion source for the production of large diameter ion beams

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