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A positron beam study of defects in SiO₂

M. FUJINAMI, N.B. CHILTON, K ISHII, Y. OHKI

J. Phys. IV France, 03 C4 (1993) C4-169-C4-175

DOI: https://doi.org/10.1051/jp4:1993423

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Citations de cet article :

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Study on excimer laser induced defects in SiO2films on Si by variable‐energy positron annihilation spectroscopy

M. Fujinami and N. B. Chilton
Applied Physics Letters 64 (21) 2806 (1994)
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