Journal de Physique IV

Laser-Induced Chemical Vapour Deposition of Silicon Carbonitride

W.F.A. Besling, P.J.J.M. van der Put and J. Schoonman

J. Phys. IV France, 05 C5 (1995) C5-953-C5-960

DOI: 10.1051/jphyscol:19955112

W.F.A. Besling

P.J.J.M. van der Put

J. Schoonman

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