Journal de Physique IV

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Optimization of the Deposition Conditions of Titanium Nitride from Ammonia and Titanium Tetrachloride

M. Nadal and F. Teyssandier

J. Phys. IV France, 05 C5 (1995) C5-809-C5-814

DOI: 10.1051/jphyscol:1995596

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