Journal de Physique IV

TiN-Ti_xSi_y Codeposits A.P.C.V.D. Produced Using the TiCl₄-N₂-SiH₂Cl₂-H₂ System

G. Llauro, A. Bendeddouche, M. Nadal and R. Hillel

J. Phys. IV France, 05 C5 (1995) C5-801-C5-807

DOI: 10.1051/jphyscol:1995595

G. Llauro

A. Bendeddouche

M. Nadal

R. Hillel

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