Journal de Physique IV

Chemical Vapour Deposition of AIN-Si₃N₄ Codeposits

F. Henry, B. Armas, C. Combescure, D. Thenegal and R. Flamand

J. Phys. IV France, 05 C5 (1995) C5-785-C5-792

DOI: 10.1051/jphyscol:1995593

F. Henry

B. Armas

C. Combescure

D. Thenegal

R. Flamand

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