Journal de Physique IV

Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing

G. Beshkov, D. Dimitrov, S. Georgiev and T. Dimitrova

J. Phys. IV France, 05 C5 (1995) C5-615-C5-619

DOI: 10.1051/jphyscol:1995573

G. Beshkov

D. Dimitrov

S. Georgiev

T. Dimitrova

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