Journal de Physique IV

Economical Analysis and Optimization of a Low Pressure Chemical Vapor Depositioni (LPCVD) Reactor

T. Tamani, P. Duverneuil and J.P. Couderc

J. Phys. IV France, 05 C5 (1995) C5-323-C5-330

DOI: 10.1051/jphyscol:1995538

T. Tamani

P. Duverneuil

J.P. Couderc

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