Journal de Physique IV

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Low Pressure CVD of Silicon Nitride from a Silane-Ammonia Mixture : Analysis of Preliminary Experimental and Simulation Results

K. Yacoubi, C. Azzaro and J.P. Couderc

J. Phys. IV France, 05 C5 (1995) C5-291-C5-298

DOI: 10.1051/jphyscol:1995534

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