Delta Doping in Si and SiGe by LP(RT)CVD B. Tillack, J. Schlote, G. Ritter, D. Krüger, G. Morgenstern and P. Gaworzewski J. Phys. IV France, 05 C5 (1995) C5-1117-C5-1123 DOI: 10.1051/jphyscol:19955132
