Journal de Physique IV

Atomic Layer-by-Layer Epitaxy of Silicon and Germanium Using Flash Heating in CVD

J. Murota, M. Sakuraba, T. Watanabe, T. Matsuura and Y. Sawada

J. Phys. IV France, 05 C5 (1995) C5-1101-C5-1108

DOI: 10.1051/jphyscol:19955130

J. Murota

M. Sakuraba

T. Watanabe

T. Matsuura

Y. Sawada

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