Journal de Physique IV

Deposition of Oxide Layers by Computer Controlled"Injection-LPCVD"

F. Felten, J.P. Senateur, F. Weiss, R. Madar and A. Abrutis

J. Phys. IV France, 05 C5 (1995) C5-1079-C5-1086

DOI: 10.1051/jphyscol:19955127

F. Felten

J.P. Senateur

F. Weiss

R. Madar

A. Abrutis

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