Journal de Physique IV

Oxygen Effect on the Stability of PECVD Boron-Carbon Films

S.Yu. Rybakov, V.M. Sharapov and L.E. Gavrilov

J. Phys. IV France, 05 C5 (1995) C5-921-C5-926

DOI: 10.1051/jphyscol:19955109

S.Yu. Rybakov

V.M. Sharapov

L.E. Gavrilov

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