Journal de Physique IV

Optical Properties of CVD-Deposited Dielectric Films for Microelectronic Devices

A. Sassella, A. Borghesi, S. Rojas and L. Zanotti

J. Phys. IV France, 05 C5 (1995) C5-843-C5-859

DOI: 10.1051/jphyscol:19955100

A. Sassella

A. Borghesi

S. Rojas

L. Zanotti

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