Journal de Physique IV

Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic Carbon

F. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas and F. Maury

J. Phys. IV France, 05 C5 (1995) C5-89-C5-96

DOI: 10.1051/jphyscol:1995508

F. Fau-Canillac

F. Carrere

A. Reynes

C. Vahlas

F. Maury

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