Journal de Physique IV

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Development of EUV light source by laser-produced plasma

Y. Izawa, N. Miyanaga, H. Nishimura, S. Fujioka, T. Aota, Y. Tao, S. Uchida, Y. Shimada, K. Hashimoto, M. Yamaura et al. (15 more)

J. Phys. IV France, 133 (2006) 1161-1165

Published online: 16 June 2006

DOI: 10.1051/jp4:2006133237

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