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Target fabrication of low-density and nanoporous materials to generate extreme ultraviolet (EUV)

K. Nagai, Q.-C. Gu, Y. Yasuda, M. Nagata, T. Norimatsu, H. Nishimura, S. Fujioka, S. Uchida, Y. Shimada, M. Yamaura et al. (7 more)

J. Phys. IV France, 133 (2006) 875-880

Published online: 16 June 2006

DOI: 10.1051/jp4:2006133176

K. Nagai

Q.-C. Gu

Y. Yasuda

M. Nagata

T. Norimatsu

H. Nishimura

S. Fujioka

S. Uchida

Y. Shimada

M. Yamaura

K. Hashimoto

H. Fujita

M. Nakatsuka

K. Nishihara

N. Miyanaga

K. Mima

Y. Izawa

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Copyright / Published by: EDP Sciences