Journal de Physique IV

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Dépôt et calibration de multicouches pour l'optique XUV dans la gamme 10–30 nm

F. Delmotte, M.F. Ravet, F. Bridou, X. Song, A. Jerome, S. Boujdayane, S. Hubert, Ph. Zeitoun, M. Idir and P. Troussel

J. Phys. IV France, 108 (2003) 255-258

DOI: 10.1051/jp4:20030638

F. Delmotte

M.F. Ravet

F. Bridou

X. Song

A. Jerome

S. Boujdayane

S. Hubert

Ph. Zeitoun

M. Idir

P. Troussel

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