Molecular beam mass spectrometry analysis of gaseous species responsible for diamond deposition in microwave plasmas O. Aubry, J.-L. Delfau, C. Met, M.I. De Barros, L. Vandenbulcke and C. Vovelle J. Phys. IV France, 12 4 (2002) 75-84 DOI: 10.1051/jp4:20020080