Journal de Physique IV

Ti-Ni SMA thin film microactuators made on a Si substrate

S. Miyazaki, V.H. No, M. Taniguchi and H. Suzuki

J. Phys. IV France, 11 PR8 (2001) Pr8-407

DOI: 10.1051/jp4:2001867

S. Miyazaki

V.H. No

M. Taniguchi

H. Suzuki

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