Journal de Physique IV

Growth of BON thin films by plasma assisted MOCVD and study of deposition parameter effects on the film structure

G.C. Chen, M.C. Kim, T.H. Kim, S.-B. Lee and J.-H. Boo

J. Phys. IV France, 11 PR3 (2001) Pr3-763-Pr3-770

DOI: 10.1051/jp4:2001396

G.C. Chen

M.C. Kim

T.H. Kim

S.-B. Lee

J.-H. Boo

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