Journal de Physique IV

Growth of Ru and RuO₂ films by metal-organic chemical vapour deposition

F. Fröhlich, D. Machajdik, V. Cambel, J. Fedor, A. Pisch and J. Lindner

J. Phys. IV France, 11 PR3 (2001) Pr3-325-Pr3-332

DOI: 10.1051/jp4:2001341

F. Fröhlich

D. Machajdik

V. Cambel

J. Fedor

A. Pisch

J. Lindner

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