Journal de Physique IV

Computational analysis of horizontal cold wall CVD reactors at low pressure : Application to tungsten deposition from pyrolysis of W(CO)₆

T.C. Xenidou, M.K. Koukou, A.G. Boudouvis and N.C. Markatos

J. Phys. IV France, 11 PR3 (2001) Pr3-183-Pr3-188

DOI: 10.1051/jp4:2001323

T.C. Xenidou

M.K. Koukou

A.G. Boudouvis

N.C. Markatos

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